Samsung Develops Quantum Computing-AI Lithography Simulation Technology for Advanced Processes

Lithography simulation for advanced processes requires repeated calculations of interactions among light, photomasks and wafer materials. It is crucial to shortening development cycles, controlling defects and improving yields. Facing competition from foundry rivals including TSMC, Samsung Electronics is incorporating quantum computing and AI into simulation to accelerate process-parameter optimization and strengthen its competitiveness in advanced chip manufacturing.

The latest project is led by Samsung SDS, the Samsung Group’s information technology services provider. It is developing a “quantum computer plus AI” lithography simulation technology that uses quantum computing for complex calculations and AI to assist with prediction and tuning. Samsung plans to complete a proof of concept in 2027 to determine whether the technology can shorten process-development times and improve chip yields. It has not disclosed the investment amount or a timetable for deployment in mass production.